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Scanning Auger Microscopy (SAM) and Auger Electron Spectroscopy (AES) - Perkin Elmer PHI 4300 SAM (upgraded in 2002)

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Contact details

Kwakernaak, C. Ing.
Mechanical, Maritime and Materials Engineering (3mE), Materials Science and Engineering
Mekelweg 2, 2628 CD Delft
Tel : +31 (0)15 27 82223
E-mail : C.Kwakernaak@tudelft.nl
Website : Open website

General Information

Instrument:

Scanning Auger Microscopy (SAM) and Auger Electron Spectroscopy (AES) - Perkin Elmer PHI 4300 SAM (upgraded in 2002)

Location:

Department of Materials Science and Engineering, Room 3B-1-06, Mekelweg 2, Delft (building #34)

Key words:

Scanning Auger Microscopy (SAM), Auger Electron Spectroscopy (AES)

Main application:

Analysis techniques employing the detection of Auger electrons are ideally suited for surface analysis due to the low escape depth of a few nanometer of these electrons. Also the chemical state of the elements can be resolved. The analytical possibilities are extended using depth profiling and line scanning.

Instrument specification

Energy resolution ΔE/E > 0.4%, acceleration voltages from 1 to 10 kV and currents up to 4000 nA. LaB6 cathode.

Note:
This instrument is intended for scientific research and is not to be used for routine analysis. Also, samples that bear a risk of contaminating the system will not be analyzed. Prior to analysis each request is assessed.

Further contact:

Dr.ir. W.G. Sloof
section Surfaces & Interfaces
Department of Materials Science and Engineering, 3ME
Mekelweg 2
2628 CD Delft
tel +31 (0)15 27 84924
E-mail:w.g.sloof@tnw.tudelft.nl