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Scanning Electron Microscope

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Contact details

Oostrum, Frans
Aerospace Engineering (LR), Delft Aerospace Structures & Materials Laboratory
Kluyverweg 1, 2629HS Delft
Tel : +31 (0)15 27 86700
E-mail : F.G.C.Oostrum@tudelft.nl
Website : Open website

General Information

Instrument:

Scanning Electron Microscope

Location:

Delft Aerospace Structures & Materials Laboratory, Kluyverweg 1, Delft (building #41)

Key words:

imaging, microscopy, SEM, surface inspection, electrons, EDX, EDS

Main application:

Surface inspection with electrons.

Instrument specification

Brand:
Jeol

Type:
JSM-840A

Acceleration Voltage:
5 - 35 kV

Magnification:
20 - 300000 x

Resolution:
up to 3.5 nm

The JEOL JSM-840 scanning electron microscope is configured with secondary and backscattered electron detectors as well as an energy dispersive X-ray spectrometer.

Element analysis topography EDX (Tracor) is coupled to the SEM.