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Micro System Analyzer MSA-400

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Contact details

van Driel, Jos
Mechanical, Maritime and Materials Engineering (3mE), Precision and Microsystems Engineering
Mekelweg 2, 2628 CD Delft
Tel : +31 (0)15 27 86838
E-mail : J.A.S.vanDriel@tudelft.nl
Website : Not available

General Information


Micro System Analyzer MSA-400


The MSA-400 allows fast measurements of microstructure motion to detect out-of-plane and inplane microstructural resonances.


Department of Precision and Microsystems Engineering, Clean Room Hal 5A, Mekelweg 2, Delft (building #34)

Key words:

stroboscopic video microscopy, 3-D dynamic characterization, laser interferometry, microstructures, microelectromechanical systems, MEMS, micro-optoelectromechanical systems, MOEMS, laser Doppler vibrometry

Main application:

The micro system analyzer MSA-400 is used for 3-D dynamic characterization of microstructures arising in microelectromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS). The device, which exploits laser Doppler vibrometry and stroboscopic video microscopy, can measure both the steadystate motion and transient motion of microstructures.

Instrument specification



Additional information on the website of the producer Polytec