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Micro System Analyzer MSA-400

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Contact details

van Driel, Jos
Mechanical, Maritime and Materials Engineering (3mE), Precision and Microsystems Engineering
Mekelweg 2, 2628 CD Delft
Tel : +31 (0)15 27 86838
E-mail : J.A.S.vanDriel@tudelft.nl
Website : Not available

General Information

Instrument:

Micro System Analyzer MSA-400

Description

The MSA-400 allows fast measurements of microstructure motion to detect out-of-plane and inplane microstructural resonances.

Location:

Department of Precision and Microsystems Engineering, Clean Room Hal 5A, Mekelweg 2, Delft (building #34)

Key words:

stroboscopic video microscopy, 3-D dynamic characterization, laser interferometry, microstructures, microelectromechanical systems, MEMS, micro-optoelectromechanical systems, MOEMS, laser Doppler vibrometry

Main application:

The micro system analyzer MSA-400 is used for 3-D dynamic characterization of microstructures arising in microelectromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS). The device, which exploits laser Doppler vibrometry and stroboscopic video microscopy, can measure both the steadystate motion and transient motion of microstructures.

Instrument specification

Brand:
Polytec

Type:
MSA-400

Additional information on the website of the producer Polytec