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Optical Profiler NT3300

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wyko_nt3300.jpg

Contact details

van Driel, Jos
Mechanical, Maritime and Materials Engineering (3mE), Precision and Microsystems Engineering
Mekelweg 2, 2628 CD Delft
Tel : +31 (0)15 27 86838
E-mail : J.A.S.vanDriel@tudelft.nl
Website : Not available

General Information

Instrument:

Optical Profiler NT3300

Description

Veeco Wyko NT3300 Optical Profiler. The NT3300 is a non contact optical profiler used to measure heights from Angstroms to millimeters, with vertical resolution to 0.1 nm.

Location:

Department of Precision and Microsystems Engineering, Laboratory equipment Mechanics of Materials, Hal 5A, Mekelweg 2, Delft (building #34)

Key words:

3D surface topography, non-contact, white light interferometry

Main application:

The NT3300 is ideally suited for quality inspection, failure analysis and rapid production measurement of MEMS, semiconductor packaging, medical devices, automotive systems and many other applications.

Instrument specification

Brand:
Veeco

Type:
Wyko NT3300

  • Capable of handling up to 8"/200mm wafers
  • Non contact sub-micron Optical Profiler for 3D Surface Profilometry
  • 8” Auto XY with 0.5 uM encoder / Auto TT
  • Vertical resolution as low as 0.1 nm
  • XY Tilt
  • Motorized Z
  • Axis Focus
  • Fast Z Focus