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Optical Profiler NT3300

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Contact details

van Driel, Jos
Mechanical, Maritime and Materials Engineering (3mE), Precision and Microsystems Engineering
Mekelweg 2, 2628 CD Delft
Tel : +31 (0)15 27 86838
E-mail : J.A.S.vanDriel@tudelft.nl
Website : Not available

General Information


Optical Profiler NT3300


Veeco Wyko NT3300 Optical Profiler. The NT3300 is a non contact optical profiler used to measure heights from Angstroms to millimeters, with vertical resolution to 0.1 nm.


Department of Precision and Microsystems Engineering, Laboratory equipment Mechanics of Materials, Hal 5A, Mekelweg 2, Delft (building #34)

Key words:

3D surface topography, non-contact, white light interferometry

Main application:

The NT3300 is ideally suited for quality inspection, failure analysis and rapid production measurement of MEMS, semiconductor packaging, medical devices, automotive systems and many other applications.

Instrument specification


Wyko NT3300

  • Capable of handling up to 8"/200mm wafers
  • Non contact sub-micron Optical Profiler for 3D Surface Profilometry
  • 8” Auto XY with 0.5 uM encoder / Auto TT
  • Vertical resolution as low as 0.1 nm
  • XY Tilt
  • Motorized Z
  • Axis Focus
  • Fast Z Focus