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Dektak 150 (Manufacturer: Veeco)

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Dektak 150

Contact details

Visser, Cassan Drs.
Electrical Engineering, Mathematics and Computer Science (EWI), DIMES
Feldmannweg 17, 2628 CT Delft
Tel : +31 (0)15 27 81787
E-mail : c.c.g.visser@tudelft.nl
Website : Open website

General Information

Instrument:

Dektak 150 (Manufacturer: Veeco)

Description

Surface profilometer

Location:

Dimes MEMSlab

Key words:

Step height

Measured quantity:

Step height

Main application:

Measuring etched structures on flat substrates

Instrument specification

Step height: 1 nm - 1 mm, Scan Length 50 micrometer - 50 mm
Vertical resolution: 0.1 nm