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Neutron Depth Profiling (NDP) Facility

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Contact details

Labohm, F. Dr.
Applied Sciences (TNW), Applied Sciences (TNW), Dept. Radiation, Radionuclides & Reactors
Mekelweg 15, 2629 JB Delft
Tel : +31 (0)15 27 81961
E-mail : F.Labohm@TUDelft.nl
Website : Open website

General Information


Neutron Depth Profiling (NDP) Facility


Reactor Hall, Reactor Institute Delft (present facility), Mekelweg 15, Delft (building #50)

Key words:

nitrogen-14., boron-10, lithium-6, Depth, Profiling, NDP, helium-3

Main application:

Measuring the concentration as a function of depth of 3He, 6Li, 10B or 14N in various substrates. Measuring the absolute amount of these nuclides per cm2.

Instrument specification

Neutron beam spot on target:
10x10 mm2

Implanted Si, resolution 12 keV

Maximum target size:
25x25 mm2 (present facility)
150x150 mm2 (new facility)

Depth resolution/detection limit in Si:
  • 3He: 210 nm/ 4x1013 at/cm2
  • 6Li 50 nm / 1x1013 at/cm2
  • 10B 20nm / 1 x1013 at/cm2
  • 14N 210 nm/ 1 x1017 at/cm2