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Dual beam FEI Strata DB 235

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Contact details

Alkemade, P.F.A. Dr.
Applied Sciences (TNW), National Centre for HREM (Kavli Institute of Nanoscience Delft)
Lorentzweg 1, 2628 CJ Delft
Tel : +31 (0)15 27 83735
E-mail : P.F.A.Alkemade@TUDelft.nl
Website : Open website

General Information

Instrument:

Dual beam FEI Strata DB 235

Location:

Physics building (# 22), Lorentzweg 1, 2628 AL, Delft

Key words:

Focussed ion beam, SEM, back scatter detector, EDS, FIB

Main application:

Materials cutting and deposition with a focussed ion beam, preparation of TEM specimens from preselected areas, SEM imaging of materials surfaces, composition analysis, crystal orientation mapping.

Instrument specification

TEM lamellas with thicknesses below 80 nm.

Fabrication of devices with feature sizes down to 20 nm.

FIB resolution 10 nm

SEM resolution 1.5 nm.